@inproceedings{li_volatile_2025,
	title = {Volatile and Non-Volatile Nanoelectromechancial Switches with Ruthenium-Enhanced Nano Contacts},
	url = {https://ieeexplore.ieee.org/document/11110616},
	doi = {10.1109/Transducers61432.2025.11110616},
	abstract = {Nanoelectromechanical ({NEM}) switches have promising applications as volatile or non-volatile electronic switching elements in areas such as low-power logic, memory, and reconfigurable circuits. However, the reliability of nano-scale contacts in {NEM} switches remains a major challenge. While ruthenium (Ru) has been successfully used for micro-scale contacts in radio frequency ({RF}) {MEMS} switches with relatively large dimensions, Ru has not been explored as contact coating in {NEM} switches. Here, we investigate and demonstrate the effectiveness of Ru-coated nano-contacts in silicon {NEM} switches, enabling both volatile and non-volatile switching of {NEM} switches fabricated within the same {NEM} device layer. These findings have the potential to advance {NEM} switch technology for low-power and reconfigurable computing applications.},
	eventtitle = {2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)},
	pages = {2098--2101},
	booktitle = {2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)},
	author = {Li, Yingying and Bleiker, Simon J. and Worsey, Elliott and Kulsreshath, Mukesh Kumar and Bolten, Jens and Ehlert, Lisa and Pamunuwa, Dinesh and Niklaus, Frank},
	urldate = {2025-11-18},
	date = {2025-06},
	note = {{ISSN}: 2167-0021},
	keywords = {Contacts, Nanoelectromechanical systems, Nanoscale devices, Nonvolatile memory, Radio frequency, Ruthenium, Sensors, Silicon, Switching circuits, Transducers, Volatile and non-volatile {NEM} switches, contact reliability, ruthenium (Ru) nano-contact},
}