%0 Conference Paper
%T Volatile and Non-Volatile Nanoelectromechancial Switches with Ruthenium-Enhanced Nano Contacts
%P 2098-2101
%W https://kth.diva-portal.org/smash/get/diva2:2014924/FULLTEXT01.pdf
%U https://ieeexplore.ieee.org/document/11110616
%X Nanoelectromechanical (NEM) switches have promising applications as volatile or non-volatile electronic switching elements in areas such as low-power logic, memory, and reconfigurable circuits. However, the reliability of nano-scale contacts in NEM switches remains a major challenge. While ruthenium (Ru) has been successfully used for micro-scale contacts in radio frequency (RF) MEMS switches with relatively large dimensions, Ru has not been explored as contact coating in NEM switches. Here, we investigate and demonstrate the effectiveness of Ru-coated nano-contacts in silicon NEM switches, enabling both volatile and non-volatile switching of NEM switches fabricated within the same NEM device layer. These findings have the potential to advance NEM switch technology for low-power and reconfigurable computing applications.
%B 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
%A Li, Yingying
%A Bleiker, Simon J.
%A Worsey, Elliott
%A Kulsreshath, Mukesh Kumar
%A Bolten, Jens
%A Ehlert, Lisa
%A Pamunuwa, Dinesh
%A Niklaus, Frank
%D 2025-06
%K Contacts
Nanoelectromechanical systems
Nanoscale devices
Nonvolatile memory
Radio frequency
Ruthenium
Sensors
Silicon
Switching circuits
Transducers
Volatile and non-volatile NEM switches
contact reliability
ruthenium (Ru) nano-contact