@inproceedings{marozauRobustnessNanoelectromechanicalSwitches2025, location = {Bordeaux, France}, title = {Robustness of nano-electromechanical switches against mechanical shock and vibration loads}, url = {https://hal.science/hal-05323115}, abstract = {Nano-electromechanical ({NEM}) switches offer significant potential for future computing and memory applications due to their low power consumption and ability to operate in high-temperature and radiation-harsh environments. However, there is a lack of studies on the robustness of {NEM} switches under mechanical loads. In this study, we investigated the performance of 3- and 7-terminal {NEM} relays under mechanical shocks up to 5000 g and vibrations up to 70 g. The results demonstrate that devices maintain mechanical functionality, with some variations in the electrical characteristics. These findings underscore the potential of {NEMS} technology for reliable operation in harsh environments, paving the way for their possible integration into next-generation electronic devices.}, booktitle = {{ESREF} 2025 : 36th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, 2025}, publisher = {Université de Bordeaux, {ADERA}}, author = {Marozau, Ivan and Tang, Qi and Kulsreshath, Mukesh and Li, Yingying and Bleiker, Simon and Niklaus, Frank and Pamunuwa, Dinesh}, urldate = {2026-02-06}, date = {2025-10}, keywords = {publication}, }