@article{marozauMechanicalShockVibration2026, title = {Mechanical shock and vibration testing of volatile and non-volatile nanoelectromechanical switches}, volume = {176}, issn = {0026-2714}, url = {https://www.sciencedirect.com/science/article/pii/S0026271425003932}, doi = {10.1016/j.microrel.2025.115980}, abstract = {Nanoelectromechanical ({NEM}) switches are promising for ultra-low-power electronics in harsh environments due to their zero leakage current and radiation hardness. However, their mechanical robustness under extreme loads remains insufficiently studied. This work investigates the performance of 3-terminal and 7-terminal {NEM} relays subjected to mechanical shocks up to 5000 g and vibrations up to 70 g. All tested devices retained mechanical functionality, confirming excellent structural integrity. Electrical characterisation revealed variations in pull-in and pull-out voltages and loss of programmed states in 7T relays, although their non-volatile capability remained intact. These instabilities are primarily attributed to the soft Au contact coating, which is prone to wear and deformation. The findings highlight the suitability of {NEM} technology for harsh environments and point to future improvements through more suitable contact materials and device miniaturization.}, pages = {115980}, journaltitle = {Microelectronics Reliability}, shortjournal = {Microelectronics Reliability}, author = {Marozau, I. and Tang, Q. and Kulsreshath, M. and Li, Y. and Bleiker, S. J. and Niklaus, F. and Pamunuwa, D.}, urldate = {2026-02-06}, date = {2026-01-01}, keywords = {Harsh environment electronics, {MEMS}/{NEMS} reliability, Mechanical shock, Mechanical vibration, Nanoelectromechanical ({NEM}) relays, Non-volatile mechanical memory, publication}, }