@article{marozauMechanicalShockVibration2026, title = {Mechanical shock and vibration testing of volatile and non-volatile nanoelectromechanical switches}, volume = {176}, issn = {0026-2714}, url = {https://www.sciencedirect.com/science/article/pii/S0026271425003932}, doi = {10.1016/j.microrel.2025.115980}, abstract = {Nanoelectromechanical (NEM) switches are promising for ultra-low-power electronics in harsh environments due to their zero leakage current and radiation hardness. However, their mechanical robustness under extreme loads remains insufficiently studied. This work investigates the performance of 3-terminal and 7-terminal NEM relays subjected to mechanical shocks up to 5000 g and vibrations up to 70 g. All tested devices retained mechanical functionality, confirming excellent structural integrity. Electrical characterisation revealed variations in pull-in and pull-out voltages and loss of programmed states in 7T relays, although their non-volatile capability remained intact. These instabilities are primarily attributed to the soft Au contact coating, which is prone to wear and deformation. The findings highlight the suitability of NEM technology for harsh environments and point to future improvements through more suitable contact materials and device miniaturization.}, urldate = {2026-02-06}, journal = {Microelectronics Reliability}, author = {Marozau, I. and Tang, Q. and Kulsreshath, M. and Li, Y. and Bleiker, S. J. and Niklaus, F. and Pamunuwa, D.}, month = jan, year = {2026}, keywords = {Harsh environment electronics, MEMS/NEMS reliability, Mechanical shock, Mechanical vibration, Nanoelectromechanical (NEM) relays, Non-volatile mechanical memory, publication}, pages = {115980}, }